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Methyltrichlorosilane deposition grade, ≥98% (GC), ≥99.99% (as metals)

Methyltrichlorosilane

Methyltrichlorosilane deposition grade, ≥98% (GC), ≥99.99% (as metals)

Synonym(s):

Trichloro(methyl)silane

Linear Formula:

CH₃SiCl₃

CAS Number:

Molecular Weight:

149.48

EC Number:

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Sigma-Aldrich (3)

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M85301

Methyltrichlorosilane, 99%

440299

Methyltrichlorosilane, ≥96%, liquid

679208

Methyltrichlorosilane, deposition grade, ≥98% (GC), ≥99.99% (as metals)